2K6 EC 701: MICROELECTRONICS TECHNOLOGY
Module 1 (12 hours)
Crystal growth and wafer preparation: – Diffusion of impurities – Flick’s I and II law of diffusion-Ion implantation. Oxidation – deal-grove method Optical lithography – Modulation transfer function. Photo resists – types. Chemical vapor deposition (CVD) – Epitaxial growth. Etching – wet plasma & ion etching. Contacts & Metallization: – Schottky contacts & Implanted ohmic contacts.
Module 2 (12 hours)
MOS transistor: – Depletion & Enhancement types – Threshold voltage-NMOS inverter – various pull-ups – CMOS & BiCMOS inverter. Introduction to IC technology: – Bipolar technology – Early bipolar & advanced bipolar processes. MOS technology: – NMOS, PMOS, CMOS, BiCMOS technologies, n well, p well, twin tub process. Hot carrier effects in BJT & CMOSLatch up in CMOS
Module 3 (15 hours)
VLSI design fundamentals :- MOS layers-Stick diagrams – NMOS& CMOS design styles – Layouts – lambda based design rules – 2 micro meter design rules – Diagrams for NMOS & CMOS inverters & gates – Simple Combinational Logic Design (half & full adders, multiplexers ).
Module 4 (13 hours)
Device isolation: – Junction & oxide isolation – LOCOS, SILO,SWAMI process – Trench isolation – Silicon on insulator isolation. Introduction to nanotransistors – Energy level diagram- Fermi function- ohms law in nanometer scaled devices-electron and spin transport- current in a one level model- potential profile-ballistic nanotransistors – nanotransistors with scattering.
Text Books
1. The Science & Engineering of Microelectronics Fabrication: – Stephan A Campbell.
2. Basic VLSI Design: – Douglas A Pucknell & Kamran Eshraghian – PHI Third Edition, 2004
3. VLSI technology :- Sze S.M – MGH
Reference Books
1. Quantum Transport: Atom to Transistor: – S.Dutta – Cambridge University Press
2. Electronic Transport in Mesosiopic Systems: – S.Dutta – Cambridge University Press
3. Solid-state Physics: – Aschroft and Meizmin
4. Principle of CMOS VLSI Design:-Neil, H.E Weste & Kamran Eshraghian – Pearson Education
5. Introduction to NMOS & CMOS VLSI System Design :-Amar Mukhergee -PHI USA 1990
6. The Material Science of Microelectronics :- Klaus J Backmann – VCH publishers
7. Microelectronic Processing :- W Scott Ruska –MGH
8. CMOS – Circuit Design, Layout & Simulation :- Jacob Baker R., Harry W Li & David E Boyce – PHI
9. www. nanohub.org
10. Theory of ballistic transistors-IEEE Trans.Electron Dev.:-Rahman A.,Guo J.,Dutta S.and Landstorm M.(2003)